Atomic Layer Deposition Tool Testing and Process Development

Currently, no Canadian-based companies are involved in the manufacturing of state-of-the-art research tools for atomic layer deposition (ALD). Angstrom Engineering is a leading manufacturer of similar technologies physical vapour deposition and chemical vapour deposition and have identified an opportunity to produce the first ALD research tool manufactured entirely in Canada. ALD is a vapour phase technique that offers sequential, self-limiting surface reactions to deposit thin films with exceptional control over thickness and composition, as well as conformality and uniformity. The demand for ALD is primarily driven by fast emerging sophisticated technological demonstrations in materials science and engineering, nanotechnology, microelectronics, displays, storage devices and bio-integrated electronics. The development of this cutting-edge manufacturing equipment will further advance the growth and opportunities in this field, especially in the uncapitalized emerging markets (i.e. Asia and Latin America). TO BE CONT’D

Faculty Supervisor:

Sean Barry

Student:

Akhil Vohra

Partner:

Angstrom Engineering Inc.

Discipline:

Chemistry

Sector:

Nanotechnologies

University:

Program: